斜め研磨

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Oblique Polishing

Fine angle adjustment is made using the biaxial oblique adjuster for easy oblique polishing of very small components, such as chip capacitors. In addition, a wide range of observations are possible for cross-sections, such as plating and thin films.

→デザインファイルに準拠

Example: Layered ceramic capacitor cross-section structure

Oblique polishing principles

Oblique polishing principles

View of biaxial oblique adjuster unit

View of biaxial oblique adjuster unit

Example biaxial oblique adjuster

2軸傾斜アジャスタ

The biaxial oblique adjuster can make high-precision and fine oblique adjustments. Oblique polishing magnifies the thickness direction for easier observation.

斜め研磨の実例「積層セラミックコンデンサ」

Example oblique polishing “Layered ceramic capacitor”

高拡大率の斜め研磨を手軽に実現することができます
斜め研磨法による拡大観察試料作成

For example, observe the oblique polishing of the cross-section structure of a 1608 type layered ceramic capacitor used for general electronic circuits.
Aluminum electrode foil is layered in the ceramic body.

試料台への搭載/試料ホルダへ取り付け

Use mounting wax, etc., to fix to the sample table.
Attach it to the edge so that the sample table does not touch the polishing disc when oblique.

2軸傾斜アジャスタ角度設定

Set the sample holder in the biaxial oblique adjuster, match it to the desired magnification, and set the angle.
The biaxial oblique adjuster adjustment mechanism is set at 5° (4 mm). In this case, the magnification is cosec 5°=11.474.

研磨

When the object to be polished is small and brittle, it normally needs to be embedded in a case, but with the IS-POLISHER a weight canceller can be used to reduce the weight of the sample holder and biaxial oblique adjuster to make possible delicate polishing without embedding.

試料の完成
通常の断面研磨での観察像
通常の断面研磨での観察像

View magnification: x500View magnification: x50

斜め研磨での観察像

View magnification: x50

かなりの高倍率でないと積層構造の様子が判らない 厚み方向だけが拡大されるので、電極の感覚のばらつきや、曲がり等が視覚的にも強調されて観察できます。
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